Product Classification
Clean nitrogen cabinet
Internal dimensions: W1280*D750*H1300mm
Product model: AMST-COL-4MS
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- Description
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★ Clean nitrogen cabinet product description:
● Control method: adopt humidity/oxygen content control method.
● 100-level high-clean filter FFU adopts imported brands such as the United States.
● Silent centrifugal fan adopts well-known imported brands such as Germany.
● Adopt optional high-quality static elimination device.
● Perform preliminary clean pretreatment on nitrogen.
● Use dual digital display controller to display and control the humidity or oxygen content in the box (choose one of the two). The equipment has good sealing performance, dust filtration, horizontal or vertical air supply.
● The equipment can be displayed by humidity and nitrogen concentration detection, nitrogen flow control, high-clean filter obstruction and other systems.
● The controller can be optionally configured to display temperature, humidity and nitrogen content data in real time, output and alarm functions.
● Modular design: This machine adopts a unique modular design. The temperature and humidity display, control system, dust removal system and static removal system can be quickly replaced, and maintenance and repair are simple, which greatly improves maintenance efficiency.
★Product Application:
● Suitable for the storage of silicon wafers and wafer boxes in the semiconductor front-end single crystal silicon process to prevent the return of particles and fogging of silicon wafers; since most storage cabinets or nitrogen cabinets are designed as fully enclosed environments, only humidity and oxygen content concentration are controlled, and there is no self-cleaning function, a large amount of dust is easily accumulated inside, and this dust is very likely to adhere to the stored products. Clean nitrogen cabinets are suitable for storing items that need to be stored at low humidity and avoid dust pollution.
★ Specifications:
● Cleanliness level: Class 100
● Specification size: W1310*D800*H1990mm
● Material: SUS304 double mirror
● Cleanliness level: Class 100
● Dehumidification level: below 5RH%
● Temperature accuracy: ±1℃
● Humidity accuracy: ±3%RH
● Number of layers: 3 layers
● Voltage: 220V 50Hz
★ Technical indicators:
1) Cleanliness level
Professional and efficient clean filtration device, the filter uses imported ultra-fine glass fiber to ensure CLASS 100~1000 in the clean cabinet.
2) TDH parameters
That is, the silicon wafers stored in the clean cabinet and dried for 2 hours should not have abnormal or excessive particles.
3) Dehumidification speed
The dehumidification performance can reach less than 5%. When the empty cabinet or fixed boxes are placed on each layer, the time required to reduce the humidity from 50% to 10% is no more than 30 minutes when the nitrogen flow rate is not more than 70L/M;
4) Imported dust-free fan: imported FFU fan for clean room, surface wind speed: 0.3~0.45m/s;
5) Static residual value (optional)
After drying for 2 hours, the silicon wafer box placed in the clean nitrogen cabinet must have a static value of ≦1kv for sampling and fixed-point testing of the silicon wafer box
6) Wind speed uniformity
There is no dead corner of nitrogen in the clean cabinet. The wind speed meter can be used to detect the wind speed at each point where the internal silicon wafer is placed. There should be no large differences.
7) Temperature and humidity display management
Temperature and humidity display: 4-inch large LED display, effective viewing distance up to 30 meters;
Temperature and humidity display monitoring: 24-hour uninterrupted monitoring of temperature and humidity. When the clean cabinet is completely closed, the humidity cannot fluctuate by more than ±5%RH.
key word：Double door dual control oven
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